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  UNISET/25


UNISET/25 consists of:

  • 5 probes for noncontact/semicontact modes  - NSG30
  • 5 probes for contact modes - CSG10
  • 5 probes for PFM - FMG01/Pt
  • 5 probes for SRM - CSG10/Au
  • 5 probes for EFM, SCM, SKM - DCP10


PROBES GENERAL INFORMATION

Material

Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped

Chip size

3.4x1.6x0.3mm

Reflective side

Au

Cantilever number

1 rectangular

Tip curvature radius

typical 6nm, guaranteed 10nm for NSG30, CSG10 probes
25-35nm for NSG10/TiN, CSG10/Au, FMF01/Pt probes;

Tip coating

DCP10 - conductive diamond-like dopped
CSG10/Au - conductive Au
FMG01/Pt - conductive Pt

   

Cantilever series

Cantilever length, L±10µm

Cantilever width, W±5µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

DCP10

100

35

2.0

190

255

325

5.5

11.5

22.5

NSG30

125

40

4.0

240 320 440 22 40

100

FMG01

225

32

2.5

47

60

90

1

3

5

CSG10, CSG10/Au

225

30

1.0

8

22

39

0.01

0.11

0.5

The set's kitting is fixed and is not the object to be changed at customer's request.
 
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